first-order dynamics,

Introduction to Chemical Engineering Thermodynamics
8th Edition
ISBN:9781259696527
Author:J.M. Smith Termodinamica en ingenieria quimica, Hendrick C Van Ness, Michael Abbott, Mark Swihart
Publisher:J.M. Smith Termodinamica en ingenieria quimica, Hendrick C Van Ness, Michael Abbott, Mark Swihart
Chapter1: Introduction
Section: Chapter Questions
Problem 1.1P
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A process to heat a semiconductor wafer operates with first-order dynamics, that is, the transfer
function relating changes in temperature T to changes in the heater input power level P is
T'(s) K
P'(s) ts +1
=
where K has units of °C/kW and t has units of min.
The process is at steady state when an engineer changes the power input stepwise from 1 to 2 kW.
She notes the following:
The process temperature initially is 100°C.
Four minutes after changing the power input the temperature is 400°C.
Thirty minutes later the temperature is 500°C and no longer seems to be changing.
(a)
What are K and in the process transfer function?
(b)
If at another time the engineer changes the power input linearly at a rate of 0.5 kW/min, what
can you say about the maximum rate of change of process temperature: When will it occur?
How large will it be?
Transcribed Image Text:A process to heat a semiconductor wafer operates with first-order dynamics, that is, the transfer function relating changes in temperature T to changes in the heater input power level P is T'(s) K P'(s) ts +1 = where K has units of °C/kW and t has units of min. The process is at steady state when an engineer changes the power input stepwise from 1 to 2 kW. She notes the following: The process temperature initially is 100°C. Four minutes after changing the power input the temperature is 400°C. Thirty minutes later the temperature is 500°C and no longer seems to be changing. (a) What are K and in the process transfer function? (b) If at another time the engineer changes the power input linearly at a rate of 0.5 kW/min, what can you say about the maximum rate of change of process temperature: When will it occur? How large will it be?
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